OVERVIEW OF MICRO-MACHINING AND MICROELECTROMECHANICAL SYSTEMS (MEMS)

Abstract

The quest for technological advancement for parts and systems with lightweight, low energy consumption, greater mobility, as well as higher efficiency and reliability, has birthed an era of miniaturized (micro-size) components and microsystems. These systems have found applications in inkjet printers, computer disk drives, accelerometers, projection display chips, blood pressure sensors, optical switches, micro-valves, and biosensors, among others. Micro-machining is a process that uses specialized tools and techniques to create small parts and components with precise dimensions and tolerances. It is a fabrication technology to produce components that make up micro-electro-mechanical systems (MEMS) with sizes in the range of micrometers to millimeters. The ability to fabricate and manipulate microscale structures and devices has the potential to revolutionize many aspects of technology and industry. In this review paper, an overview of the history of MEMS is provided, including classifications of MEMS, principles, and applications of micro-machining and MEMS. This review paper also provided insights into MEMS fabrication methods, the challenges, and the future prospects of these technologies.